the devices involving a micromechanical structure

Full Title

Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects > Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces > using vibrating tuning forks (double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719) > the devices involving a micromechanical structure