CPC Subgroup Additional Only
Y10T 117/1004 with means for measuring, testing, or sensing
Full Title
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor > Apparatus > with means for measuring, testing, or sensing
2 direct subcodes
Child Classifications
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- Y10T 117/1008 with responsive control means
- Y10T 117/1012 with a window or port for visual observation or examination