Determining the need of replenishment

Full Title

Liquid processing apparatus involving immersion; washing apparatus involving immersion > Details of liquid circulation > Liquid supply > Replenishment or recovery apparatus > Determining the need of replenishment

Child Classifications

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• G03D 2203/0625 by measuring the optical density of the film
• G03D 2203/0641 by measuring the electrical conductivity of the processing solution
• G03D 2203/065 by measuring the electrical resistance of the film
• G03D 2203/0658 by sensing the level of the processing liquid
• G03D 2203/0666 by measuring the oxidation/reduction potential of the processing liquid, i.e. degree of aging