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PCE
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CPC Subgroup Additional Only
G03D 2203/0683

Recovery or re-use of the processing liquid

Full Title

Liquid processing apparatus involving immersion; washing apparatus involving immersion > Details of liquid circulation > Liquid supply > Replenishment or recovery apparatus > Recovery or re-use of the processing liquid

Top Applicants

Top 10 applicants by patent filingsfor class G03, 2013–2023, worldwide · Source: EPO PATSTAT

  1. CANON JP 19,215
  2. CANON 12,916
  3. ASML NETHERLANDS NL 10,000
  4. FUJIFILM JP 7,814
  5. SAMSUNG ELECTRONICS COMPANY KR 5,181
  6. CARL ZEISS SMT DE 5,079
  7. RICOH COMPANY JP 4,343
  8. LG INNOTEK COMPANY KR 4,054
  9. KYOCERA DOCUMENT SOLUTIONS 3,812
  10. KYOCERA DOCUMENT SOLUTIONS JP 3,682