Ion sources; Ion guns

Full Title

Ion beam tubes (H01J25/00, H01J33/00, H01J37/00 take precedence; particle accelerators H05H) > Ion sources; Ion guns

Child Classifications

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• H01J 27/022
• H01J 27/026
• H01J 27/028
• H01J 27/04 using reflex discharge, e.g. Penning ion sources
• H01J 27/08 using arc discharge
• H01J 27/16 using high-frequency excitation, e.g. microwave excitation
• H01J 27/20 using particle bombardment, e.g. ionisers
• H01J 27/24 using photo-ionisation, e.g. using laser beam
• H01J 27/26 using surface ionisation, e.g. field effect ion sources, thermionic ion sources (H01J27/20, H01J27/24 take precedence)