Diffusion of dopants within, into or out of semiconductor bodies or layers

Full Title

Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion of dopants within, into or out of semiconductor bodies or layers

Child Classifications

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• H10P 32/12 between a solid phase and a gaseous phase
• H10P 32/14 within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
• H10P 32/15
• H10P 32/16 between a solid phase and a liquid phase
• H10P 32/17
• H10P 32/18
• H10P 32/185
• H10P 32/19