by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Silicon; Compounds thereof > Silicon > Preparation > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material > by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) > Preparation (chemical coating from the vapour phase C23C16/00) > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material > by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent