by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Full Title

Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) > Preparation (chemical coating from the vapour phase C23C16/00) > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material > by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent

Child Classifications

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• C01B 33/031 by decomposition of silicon tetraiodide