DIFF Subgroup
C23C 14/028 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > Pretreatment of the material to be coated (C23C14/04 takes precedence)
C23C 14/028 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > Pretreatment of the material to be coated (C23C14/04 takes precedence)