DIFF Subgroup
C23C 14/0676 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the coating material ( , C23C14/04 take precedence)
C23C 14/0676 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the coating material ( , C23C14/04 take precedence)