DIFF Subgroup
C23C 14/541 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Controlling or regulating the coating process
C23C 14/541 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Controlling or regulating the coating process