DIFF Subgroup Additional Only
G01B 2210/48 for measurement of a wafer
Full Title
Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors > Caliper-like sensors > for measurement of a wafer
G01B 2210/48 Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors > Caliper-like sensors > for measurement of a wafer