DIFF Subgroup Additional Only
G01N 2201/1047 with rotating optics and moving stage
Full Title
Features of devices classified in G01N21/00 > Scanning > Mechano-optical scan, i.e. object and beam moving > with rotating optics and moving stage
G01N 2201/1047 Features of devices classified in G01N21/00 > Scanning > Mechano-optical scan, i.e. object and beam moving > with rotating optics and moving stage