DIFF Subgroup Additional Only
H01J 2237/2855 Photo-emission
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Emission microscopes > Photo-emission
H01J 2237/2855 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Emission microscopes > Photo-emission