H01J 37/317 for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence)
Introduced: January 1980
Title
Titles differ between systems:
IPC: for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
CPC: for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence)
Full Title
Full titles differ between systems:
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Electron-beam or ion-beam tubes for localised treatment of objects > for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron-beam or ion-beam tubes for localised treatment of objects > for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence)
Of 3 combined children, 0 exist in both systems.
3 codes are CPC-only extensions.
Child Classifications
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