DIFF Subgroup
H10P 70/12 Full Title
Cleaning of wafers, substrates or parts of devices
Of 1 combined children, 0 exist in both systems.
1 codes are CPC-only extensions.
H10P 70/12 Cleaning of wafers, substrates or parts of devices
Of 1 combined children, 0 exist in both systems.
1 codes are CPC-only extensions.