IPC Subgroup
C01B 33/029 by decomposition of monosilane
Introduced: January 1990
Last revised: January 2006
Full Title
Silicon; Compounds thereof > Silicon > Preparation > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material > by decomposition of monosilane
Classification Context
- Section:
- CHEMISTRY; METALLURGY
- Class:
- INORGANIC CHEMISTRY
- Subclass:
- NON-METALLIC ELEMENTS; COMPOUNDS THEREOF