by decomposition of monosilane

Full Title

Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) > Preparation (chemical coating from the vapour phase C23C16/00) > by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material > by decomposition of monosilane