IPC Subgroup
H01J 37/252 Tubes for spot-analysing by electron or ion beams; Microanalysers
Introduced: January 1980
Last revised: January 2006
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Tubes for spot-analysing by electron or ion beams; Microanalysers
Classification Context
- Section:
- ELECTRICITY
- Class:
- ELECTRIC ELEMENTS
- Subclass:
- ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1 direct subcode
Child Classifications
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- H01J 37/256 using scanning beams