Intrinsic gettering, i.e. thermally inducing defects by using oxygen present in the silicon body

Full Title

Gettering within semiconductor bodies > Intrinsic gettering, i.e. thermally inducing defects by using oxygen present in the silicon body

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS