CPC Subgroup
C01B 33/10768 Full Title
Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Compounds containing halogen > Halogenated silanes
C01B 33/10768 Silicon; Compounds thereof ( C01B21/00, C01B23/00 take precedence; persilicates C01B15/14; carbides C01B32/956) > Compounds containing halogen > Halogenated silanes