CPC Subgroup
C23C 10/04 Diffusion into selected surface areas, e.g. using masks
Full Title
Solid state diffusion of only metal elements or silicon into metallic material surfaces > Diffusion into selected surface areas, e.g. using masks
C23C 10/04 Solid state diffusion of only metal elements or silicon into metallic material surfaces > Diffusion into selected surface areas, e.g. using masks