Etching

Filing statistics

CPC C25F 3/02 belongs to the parent subclass C25F, which recorded 6,983 patent applications worldwide between 2013 and 2023. Annual filings grew from 451 in 2013 to 629 in 2023 (+39%), peaking at 773 applications in 2020. The most active applicants in class C25 are CHINESE ACADEMY OF SCIENCES (1,393 applications), JFE STEEL (914 applications) and EBARA CORPORATION (738 applications).

Source: EPO PATSTAT, worldwide filings