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CPC Subgroup
G01N 21/94

Investigating contamination, e.g. dust (G01N21/85 takes precedence)

Full Title

Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light (G01N3/00 - G01N19/00 take precedence) > Systems specially adapted for particular applications > Investigating the presence of flaws or contamination > Investigating contamination, e.g. dust (G01N21/85 takes precedence)

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