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IPC Subgroup
G01N 21/94

Investigating contamination, e.g. dust

Introduced: January 2000

Last revised: January 2006

Full Title

Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light > Systems specially adapted for particular applications > Investigating the presence of flaws, defects or contamination > Investigating contamination, e.g. dust

Classification Context

Section:
PHYSICS
Class:
MEASURING; TESTING
Subclass:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES