all measurements being of a secondary emission, e.g. combination of SE measurement and characteristic X-ray measurement

Full Title

Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 > by measuring secondary emission from the material > Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement > all measurements being of a secondary emission, e.g. combination of SE measurement and characteristic X-ray measurement