CPC Subgroup Additional Only
H01J 2237/036 Spacing
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Mounting, supporting, spacing or insulating electrodes > Spacing
H01J 2237/036 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Mounting, supporting, spacing or insulating electrodes > Spacing