Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging

23 direct subcodes

Child Classifications

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H01J 2237/002 Cooling arrangements
H01J 2237/004 Charge control of objects or beams
H01J 2237/006 Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608)
H01J 2237/02 Details
H01J 2237/03 Mounting, supporting, spacing or insulating electrodes
H01J 2237/04 Means for controlling the discharge
H01J 2237/05 Arrangements for energy or mass analysis
H01J 2237/06 Sources
H01J 2237/10 Lenses
H01J 2237/15 Means for deflecting or directing discharge
H01J 2237/153 Correcting image defects, e.g. stigmators
H01J 2237/16 Vessels
H01J 2237/18 Vacuum control means
H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
H01J 2237/21 Focus adjustment
H01J 2237/22 Treatment of data
H01J 2237/244 Detection characterized by the detecting means
H01J 2237/245 Detection characterised by the variable being measured
H01J 2237/248 Components associated with the control of the tube
H01J 2237/25 Tubes for localised analysis using electron or ion beams