CPC Subgroup Additional Only
H01J 2237/1516 Multipoles
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Electrostatic means > Multipoles
H01J 2237/1516 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Electrostatic means > Multipoles