CPC Subgroup Additional Only
H01J 2237/15 Means for deflecting or directing discharge
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge
8 direct subcodes
Child Classifications
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- H01J 2237/1501 Beam alignment means or procedures
- H01J 2237/1502 Mechanical adjustments
- H01J 2237/1504 Associated circuits
- H01J 2237/1505 Rotating beam around optical axis
- H01J 2237/1506 Tilting or rocking beam around an axis substantially at an angle to optical axis
- H01J 2237/1508 Combined electrostatic-electromagnetic means
- H01J 2237/151 Electrostatic means
- H01J 2237/152 Magnetic means