Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated

Child Classifications

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• H01J 2237/2001 Maintaining constant desired temperature
• H01J 2237/2002 Controlling environment of sample
• H01J 2237/2005 Seal mechanisms
• H01J 2237/2007 Holding mechanisms
• H01J 2237/2008 specially adapted for studying electrical or magnetical properties of objects
• H01J 2237/201 for mounting multiple objects
• H01J 2237/202 Movement
• H01J 2237/204 Means for introducing and/or outputting objects
• H01J 2237/206 Modifying objects while observing
• H01J 2237/208 Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems