CPC Subgroup Additional Only
H01J 2237/18 Vacuum control means
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Vacuum control means
4 direct subcodes
Child Classifications
Navigate with arrow keys, Enter to open
- H01J 2237/182 Obtaining or maintaining desired pressure
- H01J 2237/184 Vacuum locks
- H01J 2237/186 Valves
- H01J 2237/188 Differential pressure