Measurements of non-electric or non-magnetic variables

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterised by the variable being measured > Measurements of non-electric or non-magnetic variables

Child Classifications

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• H01J 2237/24578 Spatial variables, e.g. position, distance
• H01J 2237/24585 Other variables, e.g. energy, mass, velocity, time, temperature