CPC Subgroup Additional Only
H01J 2237/245 Detection characterised by the variable being measured
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterised by the variable being measured
4 direct subcodes
Child Classifications
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- H01J 2237/24507 Intensity, dose or other characteristics of particle beams or electromagnetic radiation
- H01J 2237/24564 Measurements of electric or magnetic variables, e.g. voltage, current, frequency
- H01J 2237/24571 Measurements of non-electric or non-magnetic variables
- H01J 2237/24592 Inspection and quality control of devices