CPC Subgroup
H01J 27/22 Metal ion sources
Full Title
Ion beam tubes (H01J25/00, H01J33/00, H01J37/00 take precedence; particle accelerators H05H) > Ion sources; Ion guns > using particle bombardment, e.g. ionisers > Metal ion sources
H01J 27/22 Ion beam tubes (H01J25/00, H01J33/00, H01J37/00 take precedence; particle accelerators H05H) > Ion sources; Ion guns > using particle bombardment, e.g. ionisers > Metal ion sources