CPC Subgroup
H01J 37/295 Electron or ion diffraction tubes
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron or ion microscopes; Electron or ion diffraction tubes > Electron or ion diffraction tubes
1 direct subcode
Child Classifications
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