Electron or ion microscopes; Electron or ion diffraction tubes

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron or ion microscopes; Electron or ion diffraction tubes

Child Classifications

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• H01J 37/261
• H01J 37/266
• H01J 37/27 Shadow microscopy
• H01J 37/28 with scanning beams
• H01J 37/285 Emission microscopes, e.g. field-emission microscopes
• H01J 37/29 Reflection microscopes
• H01J 37/295 Electron or ion diffraction tubes