Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence)

Child Classifications

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• H01J 37/02 Details
• H01J 37/252 Tubes for spot-analysing by electron or ion beams; Microanalysers
• H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• H01J 37/30 Electron-beam or ion-beam tubes for localised treatment of objects
• H01J 37/32 Gas-filled discharge tubes (heating by discharge H05B)