CPC Subgroup
H01J 37/31 for cutting or drilling
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron-beam or ion-beam tubes for localised treatment of objects > for cutting or drilling