for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Gas-filled discharge tubes (heating by discharge H05B) > for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation