H01J 37/36 for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
Introduced: January 1980
Full Title
Full titles differ between systems:
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof > Gas-filled discharge tubes > for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Gas-filled discharge tubes (heating by discharge H05B) > for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
No child classifications to compare. This is a leaf node in both IPC and CPC.