CPC Subgroup
H10P 50/60 Wet etching
Full Title
Etching of wafers, substrates or parts of devices > Wet etching
4 direct subcodes
Child Classifications
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- H10P 50/61 Electrolytic etching
- H10P 50/64 of semiconductor materials
- H10P 50/66 of conductive or resistive materials
- H10P 50/68 of insulating materials