CPC Main Group H10P 70/00 Cleaning of wafers, substrates or parts of devices 8 direct subcodes Child Classifications Navigate with arrow keys, Enter to open H10P 70/10 H10P 70/20 H10P 70/30 H10P 70/40 H10P 70/50 H10P 70/60 H10P 70/70 H10P 70/80