DIFF Subgroup
C23C 14/3457 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering
C23C 14/3457 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering