Sputtering

Introduced: January 1985

Full Title

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering

CPC subdivides this area 2x more granularly than IPC with 7 additional codes.

7 codes are CPC-only extensions, 2 exist only in IPC.

IPC defines codes here since 1985.

Child Classifications

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C23C 14/3407 +3 CPC CPC only CPC only
C23C 14/3435 +2 CPC CPC only CPC only
C23C 14/3457 CPC only CPC only
C23C 14/3464 CPC only CPC only
C23C 14/3471 +1 CPC CPC only CPC only
C23C 14/3485 CPC only CPC only
C23C 14/3492 CPC only CPC only
C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering since 1990 +3 CPC IPC+CPC Available in IPC and CPC
C23C 14/36 Diode sputtering since 1985 −2 IPC IPC only IPC only
C23C 14/42 Triode sputtering since 1985 −1 IPC IPC only IPC only
C23C 14/46 by ion beam produced by an external ion source since 1985 IPC+CPC Available in IPC and CPC