DIFF Subgroup
C23C 14/42 Triode sputtering
Introduced: January 1985
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering > Triode sputtering
Of 1 combined children, 0 exist in both systems.
1 codes exist only in IPC.
IPC defines codes here since 1985.