DIFF Subgroup
C23C 16/0227 Full Title
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > Pretreatment of the material to be coated (C23C16/04 takes precedence)
Of 2 combined children, 0 exist in both systems.
2 codes are CPC-only extensions.