DIFF Subgroup
C23C 16/56 After-treatment
Introduced: January 1985
Full Title
Full titles differ between systems:
IPC:
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes > After-treatment
CPC:
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > After-treatment
No child classifications to compare. This is a leaf node in both IPC and CPC.