DIFF Subgroup
G03F 7/207 Means for focusing, e.g. automatically
Introduced: January 1985
Full Title
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor > Exposure; Apparatus therefor > Means for focusing, e.g. automatically