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PCE
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DIFF Subgroup
G03F 7/207

Means for focusing, e.g. automatically

Introduced: January 1985

Full Title

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor > Exposure; Apparatus therefor > Means for focusing, e.g. automatically