DIFF Subgroup
G03F 7/70216 Full Title
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K)
Of 14 combined children, 0 exist in both systems.
14 codes are CPC-only extensions.